发明名称 |
METHOD FOR FORMING A COMPOUND SEMI-CONDUCTOR THIN-FILM |
摘要 |
A method is provided for fabricating a thin film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor target material. The compound semiconductor target material is deposited onto a substrate to form a thin film having a composition substantially the same as a composition of the compound semiconductor target material. |
申请公布号 |
EP2260506(B1) |
申请公布日期 |
2017.03.01 |
申请号 |
EP20090755426 |
申请日期 |
2009.04.01 |
申请人 |
Sunlight Photonics Inc. |
发明人 |
BRUCE, Allan, James;FROLOV, Sergey;CYRUS, Michael |
分类号 |
H01L21/363;H01L21/02;H01L31/032;H01L31/0392;H01L31/042;H01L31/18 |
主分类号 |
H01L21/363 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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