| 摘要 |
PROBLEM TO BE SOLVED: To accurately analyze chip characteristics by efficiently extracting a characteristic shape of a mask pattern in LSI manufacturing.SOLUTION: A data processing device comprises: a storage unit that stores an array library in which a symbol array representing a partial shape of a mask pattern designed on a chip is registered; and an extraction unit that symbolizes an area in which a mask pattern indicated by design data is formed, and makes a search by the symbol array of the array library, thereby extracting the partial shape. |
