| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate flotation device capable of preventing clogging of piping and always floating substrates at a constant flotation height.SOLUTION: A substrate flotation device is provided, in the upper surface, with a flotation plate having a plurality of first vent holes jetting or sucking a gas, a plurality of second vent holes sucking or jetting the gas, and substrates are floated by jetting and suction of a gas through the first and second vent holes. The operations of the first vent holes and the second vent holes in floating substrates are switched at specified time intervals: when the first vent holes jet a gas, the second vent holes sucks the gas, and, when the first vent holes sucks a gas, the second vent holes jets the gas. |
