发明名称 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 A method comprising: - estimating a characteristic of the property based on the plurality of measurements of a property of an object, the characteristic comprising a combination of respective outcomes of respective ones of a plurality of measurements of a property of an object, the measurements weighted by a respective weighting coefficient; - using a plurality of models of the object, each respective one of the models being configured to enable a respective simulation of the performing of the plurality of measurements; and - performing, for each of respective one of the plurality of models, a respective simulation, the respective simulation including simulating the plurality of measurements under control of a respective plurality of different simulation parameters to obtain a respective plurality of simulated characteristics of the property, the plurality of different simulation parameters being indicative of the plurality of different measurement parameters.
申请公布号 NL2017242(A) 申请公布日期 2017.03.01
申请号 NL20162017242 申请日期 2016.07.27
申请人 ASML NETHERLANDS B.V. 发明人 PATRICIUS ALOYSIUS JACOBUS TINNEMANS
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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