| 摘要 |
PROBLEM TO BE SOLVED: To provide a barrier film formation device that can lower frequencies of replacement and cleaning of an internal electrode by decreasing abnormal discharges during plasma discharge, and improves the quality of barrier film formation.SOLUTION: A barrier film formation device 1 includes a gas supply pipe which is inserted into a plastic container P (hereinafter referred as a container) and blows out a medium gas for barrier film formation, an internal electrode connected to a ground side, an external electrode which covers an outer peripheral side of the container, and electric field applying means for applying an electric field for generating discharge between the external electrode and internal electrode, and forms a barrier film on an inner surface of the container by generating discharge plasma in the container. The gas supply pipe and the internal electrode are separated from each other. |
