发明名称 積層体の形成方法
摘要 A release layer is adequately protected by a protective layer when a laminate is subjected to a desired treatment. A method for forming a laminate 10 includes a protective layer forming step of forming a protective layer 15 for covering a face that is a surface of a release layer 14 and which is not adhered to a support plate 12 and not superimposed at least on an adhesive layer 13; and a protective layer removal step of removing a portion of the protective layer 15, which is exposed at the time of forming the laminate 10.
申请公布号 JP6088230(B2) 申请公布日期 2017.03.01
申请号 JP20120266699 申请日期 2012.12.05
申请人 東京応化工業株式会社 发明人 宮成 淳;中村 彰彦
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
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