Methods and apparatus for providing a floating seal for chamber doors

摘要

An apparatus is provided that includes a chamber wall section prone to deflection, a stationary section providing a sealing surface, and a flexible bellows attached to the chamber wall section and the stationary section. A system is also provided that includes a chamber including a chamber wall having an opening, a door disposed to seal the opening, a sealing surface adjacent the opening and isolated from the chamber wall, and a seal between the sealing surface and the chamber wall. Numerous other aspects are provided.

主权项

1. A system comprising:
a chamber including a chamber wall having an opening, the chamber wall subject to deflection; a door operable to seal the opening, the door including a door sealing element; a flexible seat adjacent the opening and mounted to the chamber wall; a sealing surface surrounding the opening and attached to the flexible seat, the sealing surface providing a planar surface that is mechanically isolated from deflection displacement of the chamber wall, the sealing surface adapted to have the door sealing element compressed against the sealing surface, and the sealing surface adapted to remain stationary relative to the door sealing element when the chamber wall deflects; and a seal extending between the sealing surface and the chamber wall and fastened between and to the sealing surface and the flexible seat.