Thermal processing apparatus

摘要

To provide a thermal processing apparatus where a projection area perpendicular to the axis of a sealing structure and attachment structure of heat radiation heater is decreased and a chamber volume is decreased. The apparatus has a chamber for accommodating a workpiece of a thermal processing object, the chamber having a partition wall for partitioning inside from outside of the chamber, a heat radiation heater disposed penetrating the partition wall, wherein the heater has a ring seal arranged on an outer peripheral surface of the extension section, and hermetically sealing the chamber, and a heat blocking plate arranged between the heat radiation unit and the ring seal in the axial direction of the glass tube, for blocking heat radiated from the heat radiation unit to the ring seal, the heat blocking plate having an inner peripheral surface fitting along the extension section.

主权项

1. A thermal processing apparatus comprising:
a chamber for accommodating a workpiece of a thermal processing object, the chamber having a partition wall for partitioning an inside of the chamber from an outside of the chamber; a heat radiation heater disposed penetrating the partition wall, wherein the heat radiation heater has a heat radiation unit for radiating heat to heat the workpiece, and a cylindrical glass tube covering the heat radiation unit and having an extension section extended outward beyond the heat radiation unit in an axial direction; a ring seal arranged on an outer peripheral surface of the extension section, and hermetically sealing the inside of the chamber from the outside of the chamber, the ring seal having an inner peripheral surface coming into contact with the outer peripheral surface of the extension section; and a heat blocking plate spaced apart from the ring seal and arranged between the heat radiation unit and the ring seal in the axial direction of the glass tube, for blocking heat radiated from the heat radiation unit, the heat blocking plate having an inner peripheral surface fitting along the extension section, wherein the heat radiation unit is formed of a wire having a coil shape, and the wire has a linear shape disposed inside the extension section.