Sistema y dispositivo de recolección de energía piezoeléctrico

摘要

The invention relates to a device for collecting piezoelectric mechanical energy. The device is actuated by means of mechanical energy available in the environment. The device is a piezoelectric system for collecting energy, formed by a cantilevered microbeam, based on ZnO nanostructures and monolithically integrated with Schottky diodes and a capacitor that covers the entire chip. ZnO is used in two different forms: nanowires (NW) and nanosheets (NS). These nanostructures are made to grow by means of a hydrothermal process compatible with silicon and using part of the upper capacitor electrode as a seed coat. A step-by-step process flow is proposed for the monolithic integration in a device of this type. This integration will permit a reduction in the power losses and will facilitate the combination of various generators, without concern for the polarity of the mechanical stress or the electric charge.