发明名称 |
Swing objective lens |
摘要 |
A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle θ to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent. |
申请公布号 |
US9583306(B2) |
申请公布日期 |
2017.02.28 |
申请号 |
US201514964274 |
申请日期 |
2015.12.09 |
申请人 |
HERMES MICROVISION INC. |
发明人 |
Li Shuai |
分类号 |
G21K5/04;H01J37/10;H01J37/147;H01J37/28;H01J37/145;H01J37/21 |
主分类号 |
G21K5/04 |
代理机构 |
WPAT, PC |
代理人 |
WPAT, PC ;King Justin |
主权项 |
1. A system for tilting a charged particle beam focused by an immersion objective lens, comprising:
a pre-lens deflector above and adjacent to a magnetic field generated by the immersion objective lens, said pre-lens deflector deflecting the charged particle beam to a pre-determined angle; and a swing deflector, located inside said immersion objective lens, for swinging a magnetic lens generated by the immersion objective lens into the pre-determined angle, such that the charged particle beam is focused by the swung magnetic lens and bombards a specimen with the pre-determined angle. |
地址 |
Hsinchu TW |