Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same

摘要

An exposure method may include: radiating a charged particle beam in an exposure system comprising a beam generator, radiating the beam, and main and auxiliary deflectors deflecting the beam to determine a position of a beam shot; determining whether a deflection distance from a first position of a latest radiated beam shot to a second position of a subsequent beam shot is within a first distance in a main field area of an exposure target area, the main field area having a size determined by the main deflector; setting a settling time according to the deflection distance so that a settling time of the subsequent beam shot is set to a constant minimum value, greater than zero, when the deflection distance from the first position to the second position is within the first distance; and deflecting the beam using the main deflector based on the set settling time.

主权项

1. An exposure method, comprising:
radiating a charged particle beam from a beam generator in an exposure system comprising the beam generator radiating the charged particle beam and main and auxiliary deflectors deflecting the beam radiated from the beam generator to determine a position of a beam shot on a substrate; determining whether a deflection distance from a first position of a latest radiated beam shot to a second position of a subsequent beam shot is within a first distance in a main field area of an exposure target area on the substrate, the main field area having a size determined by the main deflector; setting a settling time according to the deflection distance so that the settling time for stabilization of the subsequent beam shot is set to a constant minimum value, which is greater than zero, when the deflection distance from the first position to the second position is within the first distance; and deflecting the charged particle beam by using the main deflector to radiate the beam shot on the second position, based on the set settling time.