Semiconductor structure including backgate regions and method for the formation thereof

摘要

A semiconductor structure includes a semiconductor substrate, a plurality of transistors and an electrically insulating layer provided between the substrate and the plurality of transistors, and a trench isolation structure including a portion between a first and a second island of the semiconductor structure and extending into the substrate to a first depth. The substrate includes a bottom region having a first type of doping and extending at least to a second depth greater than the first depth, and a deep well region having a second type of doping and extending to a third depth greater than the first depth and smaller than the second depth. Each of the first and second islands includes a first backgate region having the first type of doping and being continuous with the bottom region and a second backgate region having the second type of doping and being continuous with the deep well region.

主权项

1. A semiconductor structure, comprising:
a semiconductor substrate, a plurality of transistors and an electrically insulating layer provided between said substrate and said plurality of transistors; a first trench isolation structure comprising a portion between a first and a second island of said semiconductor structure and extending into said substrate to a first depth; said substrate comprising a bottom region having a first type of doping and extending at least to a second depth greater than said first depth and a deep well region having a second type of doping and extending to a third depth greater than said first depth and smaller than said second depth; and each of said first island and said second island comprising a first backgate region disposed above said bottom region, having said first type of doping, and being continuous with said bottom region and a second backgate region disposed above said deep well region, having said second type of doping, and being continuous with said deep well region, said first and second backgate regions being provided in said substrate.