Method of making high electron mobility transistor structure

摘要

A method includes epitaxially growing a gallium nitride (GaN) layer over a silicon substrate. The method further includes epitaxially growing a donor-supply layer over the GaN layer. The method further includes forming a source and a drain on the donor-supply layer. The method further includes forming a gate structure between the source and the drain on the donor-supply layer. The method further includes plasma etching a portion of a drift region of the donor-supply layer to a depth of less than 60% of a donor-supply layer thickness. The method further includes depositing a dielectric layer over the donor-supply layer.

主权项

1. A method comprising:
epitaxially growing a gallium nitride (GaN) layer over a silicon substrate; epitaxially growing a donor-supply layer over the GaN layer, wherein the donor-supply layer is grown to have a top surface; forming a source and a drain on a first region and second region the donor-supply layer, respectively; forming a gate structure between the source and the drain on a third region of the donor-supply layer, the gate structure being disposed on the top surface; plasma etching a plurality of recesses in a portion of a drift region of the donor-supply layer to a depth of less than 60% of a donor-supply layer thickness from the top surface, wherein the plurality of recesses interpose the third region and the second region of the donor-supply layer, and wherein a portion of the top surface of the donor-supply layer interposes each of the plurality of recesses; and depositing a dielectric layer over the top surface of the donor-supply layer and in the plurality of recesses to form a plurality of dielectric plugs interposing the region and the gate region.