| 主权项 |
1. In a clean room defining a plurality of compartments/zones and including an air handling system having a plurality of speed adjustable fans and a plurality of position controllable return air dampers, wherein the air handling system is operative for supplying pressurized air to the clean room, a method of controlling particulate count in the clean room comprising:
(a) controlling speeds of the plurality of fans and/or positions of the plurality of dampers whereupon air pressure in the clean room decreases compartment/zone-by-compartment/zone in series from a first compartment/zone which has a requirement for a lowest particulate count and hence a highest air pressure in the clean room to a last compartment/zone which has a requirement for a highest particulate count and hence a lowest air pressure in the clean room, wherein, in a direction from the first compartment/zone to the last compartment/zone, each compartment/zone in the series has a lower pressure than an immediately preceding compartment/zone; (b) changing the speeds of the plurality of fans and/or the positions of the plurality of return air dampers in a manner that changes a volume of air per unit of time that moves through the clean room while maintaining the relationship that the first compartment/zone has the highest air pressure in the clean room, the last compartment/zone has the lowest air pressure in the clean room and, in the direction from the first compartment/zone to the last compartment/zone, each compartment/zone in the series has a lower pressure than an immediately preceding compartment/zone; and changing the speeds of the plurality of fans and/or the position of the plurality of return air dampers in response to determining a particle count of a compartment/zone exceeds a corresponding predetermined compartment/zone particle count. |
