Apparatus for scanning nano structure with plural AFM probes and method thereof

摘要

Plural AFM probes with different resolutions are implemented on an apparatus for scanning a nearly free-standing nanometer-scale specimen. The apparatus identifies the location and the shape of the nano structure on a specimen piece using a high resolution AFM probe, and then measures a three-dimensional shape of the identified nano structure using an atomic resolution AFM probe.

主权项

1. An apparatus for scanning a nano structure with plural AFM probes comprising:
a specimen piece on which a nano structure is placed; a probe part having plural AFM probes with different resolutions; anda motor part, being coupled to the specimen piece or the probe part, for moving the specimen piece or the plural AFM probes in a horizontal direction.