Thermocompression bonding structure and thermocompression bonding method

摘要

A thermocompression bonding structure includes a first member and a second member having a linear expansion coefficient different from that of the first member; and metal fine particles interposed between the first and second members as a bonding material to thermocompression bond the two members. The two members are disposed to apply thermal stress generating between the first member and the second member as pressurizing force on a bonding surface between the two members, and to increase temperature to thermocompression bond the first member and the second member.

主权项

1. A thermocompression bonding structure, comprising:
a first member including a metal conductor pattern having a bonding recess; a second member fitted in the bonding recess of the first member and having a linear expansion coefficient higher than that of the first member, the second member being a metal; and metal fine particles disposed in the bonding recess of the first member as a bonding material to thermocompression bond the first and second members, and having a surface thereof covered with a volatile binder material, wherein the first and second members are structured so that when temperatures of the first and second members are increased, the second member thermally expands more than the first member to generate thermal stress between the first member and the second member as a pressurizing force on a bonding portion between the first and second members to thermocompression bond the first member and the second member, and when temperatures of the metal fine particles having the surface covered with the volatile binder material are increased, the volatile binder material covering the metal fine particles is decomposed to expose the metal fine particles, and the metal fine particles are sintered in the bonding portion to thermocompression bond the first and second members.