发明名称 Modular atomic force microscope with environmental controls
摘要 A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
申请公布号 US9581616(B2) 申请公布日期 2017.02.28
申请号 US201514817517 申请日期 2015.08.04
申请人 Oxford Instruments Asylum Research, Inc 发明人 Viani Mario;Proksch Roger;Rutgers Maarten;Cleveland Jason;Hodgson Jim
分类号 G01Q30/20;G01Q30/18;G01Q10/00;G01Q30/10;G01Q30/12 主分类号 G01Q30/20
代理机构 Law Office of Scott C Harris, Inc 代理人 Law Office of Scott C Harris, Inc
主权项 1. An atomic force microscope system, comprising: a cantilever holder; an atomic force microscope cantilever attached to said cantilever holder; a stage for holding a sample, separate from said cantilever holder and below the cantilever and adjacent a tip of said cantilever; a rolling diaphragm, formed of a flexible membrane material, said rolling diaphragm sealing between said stage and said cantilever holder to form a sealed chamber between said stage and said cantilever holder; a scanning mechanism, operable for moving the stage in all of X, Y and Z dimensions while said rolling diaphragm maintaining said sealed chamber between said stage and said cantilever holder, wherein said rolling diaphragm allows at least 10 mm of movement between said stage and said cantilever holder while maintaining said sealed chamber between said stage and said cantilever holder; wherein the sample stage includes a top portion holding the sample, and a bottom portion formed of a rounded area with a cone shaped portion having an increasing diameter towards its bottom portion; and further comprising a holding screw on the scanning mechanism, holding against said cone shaped portion of said sample stage, to hold said bottom portion of said sample stage into place into the scanning mechanism in a location where tightening the holding screw presses down the sample stage by pressure on the cone shaped area.
地址 Goleta CA US