Methods for fabricating apparatus having a hermetic seal

摘要

Methods for fabricating a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.

主权项

1. A method for sealing a sensor to a housing comprising:
providing a housing with a top and bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a first cavity that extends down into the housing from the top and is coaxial with the hole and wherein the housing further comprises a second cavity that extends down into the housing from the top and surrounds, and is coaxial with, the first cavity such that a cavity wall is formed between the first cavity and the second cavity; pressing a cylindrically shaped radial seal with an axial height greater than a radial thickness inside the first cavity such that an outer wall of the radial seal fits against an inside surface of the cavity wall; providing an isolation member coupled to the sensor; placing the isolation member down into the radial seal within the first cavity; placing a collar down into the second cavity of the housing and pressing the collar down such that it deforms the cavity wall and seals the housing to the isolation member.