| 发明名称 |
Shielding Unit and Plating Apparatus Including the Same |
| 摘要 |
A shielding unit for a plating apparatus may include a shielding plate, a controlling plate and a rotary actuator. The shielding plate may have a plurality of holes configured to permit a passage of an electrolyte therethrough. The controlling plate may make contact with the shielding plate. The controlling plate may have a plurality of controlling holes for controlling an opening ratio of the plurality of holes of the shielding plate. The rotary actuator may rotate the controlling plate to control the opening ratio of the plurality of holes shielding plate. |
| 申请公布号 |
US2017051424(A1) |
申请公布日期 |
2017.02.23 |
| 申请号 |
US201615234687 |
申请日期 |
2016.08.11 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Fujisaki Atsushi;Choi Ju-II;Park Kun-Sang;Park Byung-Lyul;Park Ji-Soon |
| 分类号 |
C25D5/02;C25D21/12 |
主分类号 |
C25D5/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A shielding unit for a plating apparatus comprising:
a shielding plate having a plurality of holes configured to permit a passage of an electrolyte therethrough; a controlling plate configured to make contact with the shielding plate, the controlling plate having a plurality of controlling holes for controlling an opening ratio of the plurality of holes of the shielding plate; and a rotary actuator configured to rotate the controlling plate to control the opening ratio of the plurality of holes of the shielding plate. |
| 地址 |
Suwon-si KR |
