| 发明名称 |
APPARATUS AND METHOD FOR GENERATING HIGH CURRENT NEGATIVE HYDROGEN ION BEAM |
| 摘要 |
An apparatus to generate negative hydrogen ions. The apparatus may include an ion source chamber having a gas inlet to receive H2 gas; a light source directing radiation into the ion source chamber to generate excited H2 molecules having an excited vibrational state from at least some of the H2 gas; a low energy electron source directing low energy electrons into the ion source chamber, wherein H− ions are generated from at least some of the excited H2 molecules; and an extraction assembly arranged to extract the H− ions from the ion source chamber. |
| 申请公布号 |
US2017053776(A1) |
申请公布日期 |
2017.02.23 |
| 申请号 |
US201514831468 |
申请日期 |
2015.08.20 |
| 申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
Lee W. Davis;Bassom Neil;Renau Anthony |
| 分类号 |
H01J37/08;H01J37/317 |
主分类号 |
H01J37/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus to generate negative hydrogen ions, comprising:
an ion source chamber having a gas inlet to receive H2 gas; a light source directing radiation into the ion source chamber to generate excited H2 molecules having an excited vibrational state from at least some of the H2 gas; a low energy electron source directing low energy electrons into the ion source chamber, wherein H− ions are generated from at least some of the excited H2 molecules; and an extraction assembly arranged to extract the H− ions from the ion source chamber, wherein the light source is embedded at least partially in a wall of the ion source chamber, or is disposed within the ion source chamber. |
| 地址 |
Gloucester MA US |
