| 发明名称 |
APPARATUS FOR FORMING CRYSTALLINE SHEET FROM A MELT |
| 摘要 |
An apparatus for drawing a crystalline sheet from a melt. The apparatus may include a crucible configured to contain the melt and having a dam structure, where the melt comprises an exposed surface having a level defined by a top of the dam structure. The apparatus may further include a support apparatus disposed within the crucible and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus, and may include a melt-back heater directing heat through the upper surface of the support apparatus to partially melt the crystalline sheet when the crystalline sheet is drawn over the support apparatus. |
| 申请公布号 |
US2017051430(A1) |
申请公布日期 |
2017.02.23 |
| 申请号 |
US201514830140 |
申请日期 |
2015.08.19 |
| 申请人 |
Varian Semiconductor Equipment Associates, Inc. |
发明人 |
SUN Dawei;KELLERMAN Peter L.;Thronson Gregory |
| 分类号 |
C30B15/24;C30B29/20;C30B15/14;C30B15/06;C30B15/10 |
主分类号 |
C30B15/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for drawing a crystalline sheet from a melt, comprising:
a crucible configured to contain the melt and having a dam structure, the melt comprising an exposed surface having a level defined by a top of the dam structure; a support apparatus disposed within the crucible and having an upper surface, wherein the crystalline sheet is maintained flush with the exposed surface of the melt when drawn over the support apparatus; and a melt-back heater directing heat through the upper surface of the support apparatus to partially melt the crystalline sheet when the crystalline sheet is drawn over the support apparatus. |
| 地址 |
Gloucester MA US |
