发明名称 |
HYDROGEN SENSOR PRODUCTION METHOD AND HYDROGEN SENSOR PRODUCED THEREBY |
摘要 |
A hydrogen sensor production method and a hydrogen sensor produced thereby are provided. In particular, the hydrogen sensor can be produced by: forming a single self-assembly layer on a stamp substrate provided with a nanoline pattern concavo-convex part; depositing a metallic thin-film layer on the single self-assembly layer; then disposing the stamp substrate on a sensor substrate such that a polymer layer coated on the upper part of the flexible sensor substrate and a metallic thin film deposited on the concavo-convex part come into contact with one another; performing pressure and heat treatment on the stamp substrate; then removing the stamp substrate so as to transfer a metallic nanoribbon array having nanogaps to the sensor substrate; and forming a first electrode and a second electrode at either end of the transferred metallic nanoribbon array. |
申请公布号 |
WO2017030421(A1) |
申请公布日期 |
2017.02.23 |
申请号 |
WO2016KR09200 |
申请日期 |
2016.08.19 |
申请人 |
GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
JUNG, Gunyoung;PARK, Yusin |
分类号 |
G01N27/407;B82Y15/00;H01L21/28 |
主分类号 |
G01N27/407 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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