Ammonia Radical Generator

摘要

An apparatus includes a base having first and second inlets. Inner and outer cylinders are disposed on the base, with the outer cylinder being concentric with the inner cylinder. An inner surface of the inner cylinder defines an internal volume. An outer surface of the inner cylinder and an inner surface of the outer cylinder define a chamber space. An ultraviolet lamp is disposed within the internal volume. A top cover is positioned over the inner and outer cylinders and in a sealing relationship with the cylinders. The top cover has a first passageway in flow communication with the chamber space, and a second passageway in flow communication with the internal volume. The first inlet is in flow communication with the chamber space and the second inlet is in flow communication with the internal volume. A system including a process chamber and an ammonia radical generator also is described.

主权项

1. An apparatus, comprising:
a base having a first inlet and a second inlet; an inner cylinder disposed on the base, the inner cylinder being comprised of a first quartz material, and an inner surface of the inner cylinder defining an internal volume; an outer cylinder disposed on the base, the outer cylinder being comprised of a second quartz material, the outer cylinder being concentric with the inner cylinder, and an outer surface of the inner cylinder and an inner surface of the outer cylinder defining a chamber space; an ultraviolet (UV) lamp disposed within the internal volume; and a top cover positioned over the inner cylinder and the outer cylinder and in a sealing relationship with each of the inner cylinder and the outer cylinder, the top cover having a first passageway in flow communication with the chamber space, and the top cover having a second passageway in flow communication with the internal volume, wherein the first passageway is not in flow communication with the second passageway, and wherein the first inlet of the base is in flow communication with the chamber space and the second inlet of the base is in flow communication with the internal volume.