| 发明名称 |
SUSCEPTOR AND SUBSTRATE PROCESSING APPARATUS |
| 摘要 |
A susceptor includes a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part. |
| 申请公布号 |
US2017051406(A1) |
申请公布日期 |
2017.02.23 |
| 申请号 |
US201615203433 |
申请日期 |
2016.07.06 |
| 申请人 |
ASM IP Holding B.V. |
发明人 |
MORI Yukihiro;VERBAAS Melvin |
| 分类号 |
C23C16/455;C23C16/458;H01J37/32;C23C16/50 |
主分类号 |
C23C16/455 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A susceptor comprising:
a plate part; a first heater for heating a first portion of the plate part; a second heater for heating a second portion of the plate part; and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part. |
| 地址 |
Almere NL |
