METHOD OF FORMING POLYARYL POLYMERS AND POLYMERS FORMED THEREBY

摘要

In a method of forming a polyaryl polymer, a fluorosulfonate-containing monomer is coupled with itself or a boron-containing comonomer in the presence of a catalyst and a base. The resulting polymers can be used as precursors to electrically conducting polymers, and as components of resist or underlayer compositions for photolithography, among other applications.

主权项

1. A method of forming a polyaryl polymer, the method comprising: reacting a monomer in the presence of a catalyst and a base to form a polymer; wherein the monomer comprises
(a) a first monomer having structure (1) wherein Arx is unsubstituted or substituted C6-43 arylene, or unsubstituted or substituted C3-43 heteroarylene; and Bx is a boron-containing functional group bonded to Arx via a boron atom; or (b) a first comonomer having structure (2) and a second comonomer having structure (3) wherein Arx is independently at each occurrence unsubstituted or substituted C6-24 arylene, or unsubstituted or substituted C3-24 heteroarylene; Y1 is chloro, bromo, iodo, mesylate, tosylate, triflate, sulfonyl fluoride, sulfonyl chloride, sulfonyl bromide, or sulfonyl iodide; and Bx is independently at each occurrence a boron-containing functional group bonded to Arx via a boron atom.