发明名称 NOVOLAC-TYPE PHENOLIC HYDROXY GROUP-CONTAINING RESIN, AND RESIST FILM
摘要 The purpose of the present invention is to provide: a novolac-type phenolic hydroxy group-containing resin having excellent developability, heat resistance and dry etching resistance; and a resist film. A novolac-type phenolic hydroxy group-containing resin characterized by having, as a repeating unit, a structural moiety (I) represented by structural formula (1) [wherein Ar represents an arylene group; R1's independently represent any one of a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, an aralkyl group and a halogen atom; and m's independently represent an integer of 1 to 3] or a structural moiety (II) represented by structural formula (2) [wherein Ar represents an arylene group; R1's independently represent any one of a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, an aralkyl group and a halogen atom; and m's independently represent an integer of 1 to 3].
申请公布号 WO2017029935(A1) 申请公布日期 2017.02.23
申请号 WO2016JP71381 申请日期 2016.07.21
申请人 DIC CORPORATION 发明人 IMADA Tomoyuki;SATO Yusuke
分类号 C07C39/15;C07C37/20;C08G8/20;C08L61/12;G03F7/023;G03F7/11 主分类号 C07C39/15
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