| 摘要 |
An electrostatic chuck heater 20 is provided with an electrostatic chuck 22, a sheet heater 30, and a support block 60. In the electrostatic chuck 22, an electrostatic electrode 24 is embedded in a ceramic sintered compact 26. The sheet heater 30 is a resin sheet 32 having a plurality of correction heater electrodes 34 and a plurality of reference heater electrodes 44. One surface of the sheet heater 30 is bonded by the resin to the electrostatic chuck 22 and the other surface of the sheet heater 30 is bonded by the resin to the support block 60, which is made of metal. |
