MEASURING METHOD FOR ATOMIC FORCE MICROSCOPE

摘要

Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.

主权项

1. A measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method comprising:
detecting a motion of the probe while vibrating the probe on the surface of the sample; acquiring surface information on the sample by using a variation in the motion of the probe wherein the surface information on the sample comprises a position and a slope of the surface; and controlling the probe by using the surface information on the sample, wherein the vibrating of the probe on the surface of the sample comprises performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.