发明名称 |
PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT |
摘要 |
A pressure sensor includes a pressure sensor device including a diaphragm that undergoes bending deformation under pressure and a sensor section disposed on the diaphragm and a pressure sensor device including a diaphragm that undergoes bending deformation under pressure and a sensor section disposed on the diaphragm, and one of the sensor sections has a positive temperature characteristic, and the other has a negative temperature characteristic. |
申请公布号 |
US2017052081(A1) |
申请公布日期 |
2017.02.23 |
申请号 |
US201615234360 |
申请日期 |
2016.08.11 |
申请人 |
Seiko Epson Corporation |
发明人 |
SHIMADA Hiroyuki |
分类号 |
G01L9/00;G01C5/06 |
主分类号 |
G01L9/00 |
代理机构 |
|
代理人 |
|
主权项 |
1. A pressure sensor comprising:
a first pressure sensor device including a first diaphragm that undergoes bending deformation under pressure and a first sensor section disposed on the first diaphragm; and a second pressure sensor device including a second diaphragm that undergoes bending deformation under pressure and a second sensor section disposed on the second diaphragm, wherein one of the first sensor section and the second sensor section has a positive temperature characteristic, and another of the first sensor section and the second sensor section has a negative temperature characteristic. |
地址 |
Tokyo JP |