发明名称 PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
摘要 A pressure sensor includes a pressure sensor device including a diaphragm that undergoes bending deformation under pressure and a sensor section disposed on the diaphragm and a pressure sensor device including a diaphragm that undergoes bending deformation under pressure and a sensor section disposed on the diaphragm, and one of the sensor sections has a positive temperature characteristic, and the other has a negative temperature characteristic.
申请公布号 US2017052081(A1) 申请公布日期 2017.02.23
申请号 US201615234360 申请日期 2016.08.11
申请人 Seiko Epson Corporation 发明人 SHIMADA Hiroyuki
分类号 G01L9/00;G01C5/06 主分类号 G01L9/00
代理机构 代理人
主权项 1. A pressure sensor comprising: a first pressure sensor device including a first diaphragm that undergoes bending deformation under pressure and a first sensor section disposed on the first diaphragm; and a second pressure sensor device including a second diaphragm that undergoes bending deformation under pressure and a second sensor section disposed on the second diaphragm, wherein one of the first sensor section and the second sensor section has a positive temperature characteristic, and another of the first sensor section and the second sensor section has a negative temperature characteristic.
地址 Tokyo JP