INSTALLATION AND METHOD FOR THE TREATMENT OF A WORKPIECE WITH A PROCESS FLUID

摘要

The invention relates to an installation (10) for the treatment of a workpiece (12) with a process fluid (49), having a workpiece-receiving region (42) for receiving the workpiece (12), and having a device (46) for applying the process fluid (49) to the workpiece (12) in the workpiece-receiving region (42). The installation (10) comprises a closable working chamber (14) to which at least a partial vacuum can be applied, a housing (40) which is arranged in the working chamber (14) and which has a suction port (58) and which serves for surrounding a workpiece (12) received in the workpiece-receiving region (42), and a suction-extraction device (18) which is connected to the suction port (58) by way of a suction line (60).