| 发明名称 |
Arc Lamp and Substrate Heating Apparatus Having the Arc Lamp |
| 摘要 |
An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion. |
| 申请公布号 |
US2017053791(A1) |
申请公布日期 |
2017.02.23 |
| 申请号 |
US201615094358 |
申请日期 |
2016.04.08 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Kang Gon-Su;KANG Sung-Ho;KIM Min-Chul;RYU Sun-Ho;LEE Kwang-jun;LEE Yong-Hun;LEE Ju-Hong;CHOI Sun-Hong;HA Sang-Cheol |
| 分类号 |
H01J61/52;H01L21/67;H01J61/06 |
主分类号 |
H01J61/52 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An arc lamp, comprising:
an arc tube configured to receive a reaction gas therein; and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electric arc, the anode comprising: an anode head portion extending inwardly from an end portion of the arc tube; and an anode tip portion bonded to the anode head portion, wherein the anode tip portion comprises a top surface, and wherein a trench extends around the top surface in a peripheral region of the anode tip portion. |
| 地址 |
Suwon-si KR |
