发明名称 METHOD FOR PRODUCING NITRIDE CRYSTAL AND NITRIDE CRYSTAL
摘要 A high-quality nitride crystal can be produced efficiently by charging a nitride crystal starting material that contains tertiary particles having a maximum diameter of from 1 to 120 mm and formed through aggregation of secondary particles having a maximum diameter of from 100 to 1000 μm, in the starting material charging region of a reactor, followed by crystal growth in the presence of a solvent in a supercritical state and/or a subcritical state in the reactor, wherein the nitride crystal starting material is charged in the starting material charging region in a bulk density of from 0.7 to 4.5 g/cm3 for the intended crystal growth.
申请公布号 US2017051434(A1) 申请公布日期 2017.02.23
申请号 US201615346959 申请日期 2016.11.09
申请人 MITSUBISHI CHEMICAL CORPORATION 发明人 MIKAWA Yutaka;FUJISAWA Hideo;KAMADA Kazunori;NAGAOKA Hirobumi;KAWABATA Shinichiro;KAGAMITANI Yuji
分类号 C30B29/40;C01B21/06;H01L21/02;H01L29/20;H01S5/30;H01L29/36;H01L33/00;H01L33/32;H01L33/02;H01S5/323;C30B7/10;H01L29/207 主分类号 C30B29/40
代理机构 代理人
主权项 1. (canceled)
地址 Chiyoda-ku JP