DETECTOR FOR X-RAYS WITH HIGH SPATIAL AND HIGH SPECTRAL RESOLUTION

摘要

An x-ray spectrometer system comprising an x-ray imaging system with at least one achromatic imaging x-ray optic and an x-ray detection system. The optical train of the imaging system is arranged so that its object focal plane partially overlaps an x-ray emitting volume of an object. An image of a portion of the object is formed with a predetermined image magnification at the x-ray detection system. The x-ray detection system has both high spatial and spectral resolution, and converts the detected x-rays to electronic signals. In some embodiments, the detector system may have a small aperture placed in the image plane, and use a silicon drift detector to collect x-rays passing through the aperture. In other embodiments, the detector system has an energy resolving pixel array x-ray detector. In other embodiments, wavelength dispersive elements may be used in either the optical train or the detector system.

主权项

1. An x-ray spectrometer system, comprising:
an x-ray imaging system having an object plane and an image plane; and an x-ray detector system; said x-ray imaging system comprising at least one achromatic x-ray optical element, and being positioned
to collect x-rays emitted from a portion of an object such that the object plane overlaps with a predetermined x-ray emitting volume, andto form an image of the collected x-rays in the image plane; and said x-ray detector system comprising: a means for detecting x-rays from at least one predetermined spatially distinct sub-portion of the x-ray image corresponding to a predetermined volume within the x-ray emitting volume of the object; and a means for producing electronic signals
related to the number of x-rays having specific energy values detected for said predetermined spatially distinct sub-portion of the image.