主权项 |
1. A vibration generator vibrating a vibration target, comprising:
a slip table to which the vibration target is attached; a base plate provided under the slip table, the base plate comprising a first base plate structural element and a second base plate structural element adjacent to the first base plate structural element in a vertical cross-sectional view of the base plate; and a flow-passage-forming element provided between the first base plate structural element and the second base plate structural element, the flow-passage-forming element including a flow passage in which a fluid flows, the flow passage in the flow-passage-forming element comprising a vertical flow passage and a horizontal flow passage, the vertical flow passage supplying the fluid to bottom faces of the first base plate structural element and the second base plate structural element, the horizontal flow passage supplying the fluid to a side face of the first base plate structural element and a side face of the second base plate structural element opposite the side face of the first base plate structural element. |