HIGHLY REFLECTIVE SURFACE PROFILE MEASUREMENT SYSTEM WITH LIQUID ATOMIZATION AND THE METHOD THEREOF

摘要

A highly reflective surface profile measurement system with liquid atomization and a method thereof are both provided. The method includes the following steps: spraying a liquid to form a droplet layer on the surface to reduce temporarily the roughness; scanning the surface by emitting an incident light and receiving a reflected/refracted light to obtain an electric signal; and processing the electric signal to generate an output which carries with the profile or the defect information of the surface.

主权项

1. A surface profile measurement system with liquid atomization, comprising:
a platform; a light source configured to emit an incident light; a photoelectric sensor configured to receive a reflected/refracted light to convert into an electric signal; a sprayer configured to spray liquid drops, a controller connected by electricity to activate the light source, the photoelectric sensor and the sprayer; and a processor connected by electricity to the controller to process the electric signal.