发明名称 基板のボンディング方法
摘要 This invention relates to a method for bonding of a first contact area of a first at least largely transparent substrate to a second contact area of a second at least largely transparent substrate, on at least one of the contact areas an oxide being used for bonding, from which an at least largely transparent interconnection layer is formed with an electrical conductivity of at least 10e1 S/cm2 (measurement: four point method, relative to temperature of 300K) and an optical transmittance greater than 0.8 (for a wavelength range from 400 nm to 1500 nm) on the first and second contact area.
申请公布号 JP6085677(B2) 申请公布日期 2017.02.22
申请号 JP20150523427 申请日期 2012.07.26
申请人 エーファウ・グループ・エー・タルナー・ゲーエムベーハー 发明人 マークス ヴィンプリンガー
分类号 H01L21/02;H01L31/043;H01L31/18 主分类号 H01L21/02
代理机构 代理人
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