| 摘要 |
PROBLEM TO BE SOLVED: To improve productivity in exposure technology.SOLUTION: An exposure device comprises: a first moving part including a first substrate holding part for holding a substrate, and moving the first substrate holding part between a first standby position, and a first exposure position in which the substrate is arranged with an exposure surface being directed to a first direction (1); a second moving part including a second substrate holding part for holding the substrate, and moving the second substrate holding part between a second standby position, and a second exposure position in which the substrate held by the second substrate holding part is arranged with the exposure surface being directed to the first direction and aligned with the exposure surface of the substrate in the first exposure position and in a second direction orthogonal to the first direction (2); an exposure head movable between the first exposure position and the second exposure position, along a guide arranged along the second direction (3); and an exposure part for selectively exposing the substrate arranged in the first exposure position and the substrate arranged in the second exposure position. |
