| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece release device capable of releasing a workpiece in a carrier hole of a work carrier surely in spite of an inexpensive and simple structure, and a release method for surely releasing the workpiece by using the workpiece release device.SOLUTION: The workpiece release device for releasing a workpiece in a carrier hole of a work carrier disposed on a lower mold platen of a polishing device is configured so that a suction pad 122 of a robot hand 12 sucks the workpiece directly on the workpiece where a transfer robot 11 is fitted to the carrier hole, and a fluid injection device 123 injects water for releasing the workpiece. The release method using the workpiece release device is also provided. |
