| 摘要 |
PROBLEM TO BE SOLVED: To provide a light emitting diode that can reduce density of helical dislocation generated in epitaxial layer structure, and to provide a manufacturing method thereof.SOLUTION: A light emitting diode and a manufacturing method thereof comprise: an epitaxial substrate comprising a plurality of projecting sections and a plurality of recessed sections while forming a rough surface on one surface of the substrate, and comprising a plurality of projecting parts and a plurality of recessed parts in each projecting section; and epitaxial layer structure covering the rough surface of the epitaxial substrate. |
