发明名称 非晶質炭素膜からなる層への固定化方法及び積層体
摘要 A method for fixation, onto a layer comprising an amorphous carbon film and provided on a base material, of a layer comprising a material condensation-reacting with hydroxyl groups on a surface of the amorphous carbon film, whereby, in the layer comprising an amorphous carbon film and provided on the base material, the amorphous carbon film can have a holding power which is strong enough to fix the layer comprising a material condensation-reacting with a hydroxyl group on the surface of the amorphous carbon film and can have uniformity of the holding power. Si and O are added into the layer comprising an amorphous carbon film to thereby improve adhesion durability and binding uniformity of the layer comprising a material condensation-reacting with a hydroxyl group. Particularly, by using a fluorine-based silane coupling agent, it is possible to impart high functions such as water repellency/oil repellency, abrasion resistance, chemical resistance, low friction properties and non-tackiness to the amorphous carbon film.
申请公布号 JP6085652(B2) 申请公布日期 2017.02.22
申请号 JP20150190194 申请日期 2015.09.28
申请人 太陽誘電ケミカルテクノロジー株式会社 发明人 澁澤 邦彦;佐藤 剛
分类号 C01B32/15;B32B27/00;C01B32/18;C01B32/182;C23C16/26 主分类号 C01B32/15
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