| 发明名称 |
Focussing lens and charged particle beam device for non zero landing angle operation |
| 摘要 |
The present invention relates to focusing lens (2), a charged particle beam device (1) and a method for focussing a charged particle beam (3) onto a |
| 申请公布号 |
EP1648018(B1) |
申请公布日期 |
2017.02.22 |
| 申请号 |
EP20040024521 |
申请日期 |
2004.10.14 |
| 申请人 |
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH |
发明人 |
Frosien, Jürgen |
| 分类号 |
H01J37/145;H01J37/28 |
主分类号 |
H01J37/145 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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