| 摘要 |
PROBLEM TO BE SOLVED: To simultaneously form, by etching without damaging a wiring layer, an engaging hole engaged with a sealing member and a penetration electrode hole into which a penetration electrode is inserted.SOLUTION: A penetration electrode hole 75a and engaging hole 76 are simultaneously formed by etching after a sensor chip 20b is provided with a mask 60 in which the dimension B of the narrowest portion of the engaging hole opening 62 is made smaller than the dimension A of the narrowest portion of the electrode hole opening 61. In this method, the depth b of the engaging hole 76 becomes less than the depth a of the penetration electrode hole 75a by a micro loading effect, so that the engaging hole 76 can be prevented from damaging a wiring layer 58. |
