发明名称 半導体基板およびその製造方法
摘要 A method of manufacturing a semiconductor substrate includes a device-forming process of forming a plurality of device areas in a substrate section, a first wiring process of forming circuit wirings connected to the plurality of device areas, an electrode pad-forming process of forming a plurality of electrode pads, a second wiring process of forming a potential adjustment wiring electrically connecting at least a part of the electrode pads, an electrode-forming process of forming electrode bodies on the electrode pads by electroless plating after the second wiring process, and a potential adjustment-releasing process of releasing a connection by the potential adjustment wiring after the electrode-forming process.
申请公布号 JP6084139(B2) 申请公布日期 2017.02.22
申请号 JP20130184365 申请日期 2013.09.05
申请人 オリンパス株式会社 发明人 右田 千裕;石田 尚;竹本 良章
分类号 H01L21/3205;H01L21/60;H01L21/768;H01L23/522 主分类号 H01L21/3205
代理机构 代理人
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