| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein when an impedance adjustment device is applied to a high frequency power supply system, the impedance adjustment device must feed output frequency information to a high frequency power supply 1v, but a difference (error) may occur between frequencies recognized by both of them to disable accurate impedance matching.SOLUTION: A target information specification section 180 specifies position information C about a variable capacitor 21 and output frequency information F about the high frequency power supply 1v which bring a reflection coefficient at an input end closer to a preset target input reflection coefficient on the basis of information such as a detected output frequency of the high frequency power supply 1v. A target frequency setting section 192 sets and outputs to the high frequency power supply 1v target frequency information Fmat (Target output frequency fmat-Current output frequency Fnow+Power-supply-recognized output frequency Fge). |
