| 摘要 |
PROBLEM TO BE SOLVED: To provide a small light-weight flow control valve which is inexpensive and easy to be maintained.SOLUTION: Pressurization parts 13a, 23a and stationary parts 13c, 23c of a first diaphragm 13 and a second diaphragm 23 are laminated, and a piezo electric element 1 is connected to a pressurization part 13a via a connection ball 4. The pressurization part 23a is arranged to face a flow channel opening 25 in which a part of a flow channel 15 inside of a base 5 opens on a surface. A drive force of the piezo electric element 1 drives the pressurization part 23a to control a flow rate. |
