发明名称 |
ADHESIVE SHEET, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING SAME, METHOD FOR MANUFACTURING THERMAL AIRFLOW SENSOR USING SAME, AND THERMAL AIRFLOW SENSOR |
摘要 |
Provided is a thermal type airflow volume meter improving measurement accuracy, a method for manufacturing the same, and an adhesive sheet for use therein, the adhesive sheet divided into at least two or more per adherend and having a thickness of approximately 0.1 mm or less is divided to correspond to a shape of the adherend and generates or increases adhesion or stickiness by external energy. |
申请公布号 |
EP3009486(A4) |
申请公布日期 |
2017.02.22 |
申请号 |
EP20140810749 |
申请日期 |
2014.04.18 |
申请人 |
Hitachi Automotive Systems, Ltd. |
发明人 |
IKEO, Satoshi;SAGAWA, Toshifumi;DOI, Ryosuke;KIKUCHI, Hiroshi;MUKUNO, Hideki |
分类号 |
C09J7/00;C09J7/02;C09J11/04;C09J201/00;G01F1/684;G01F1/692;G01F5/00;G01F15/10;H01L21/02;H01L21/301;H01L21/52;H01L21/683;H01L21/78 |
主分类号 |
C09J7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|