发明名称 表示装置の作製方法
摘要 PROBLEM TO BE SOLVED: To provide a technique for manufacturing a flexible display device using a flexible substrate such as a resin substrate.SOLUTION: A flexible display device using a resin substrate is manufactured by the steps of: forming the resin substrate on a fixed substrate via an amorphous silicon film to be a release layer; forming at least a TFT element on the resin substrate; and peeling the resin substrate from the fixed substrate at the amorphous silicon film by irradiating the amorphous silicon film with laser light.
申请公布号 JP6085015(B2) 申请公布日期 2017.02.22
申请号 JP20150189151 申请日期 2015.09.28
申请人 株式会社半導体エネルギー研究所 发明人 山崎 舜平;高山 徹
分类号 H01L21/02;G09F9/30;H01L27/32;H01L51/50;H05B33/10 主分类号 H01L21/02
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