| 摘要 |
The present invention provides a detection apparatus which causes light to be incident obliquely on a substrate (3) including a plurality of layers whose refractive indices are different from each other and detects a height of the substrate using light reflected from the substrate, the apparatus comprising an optical system (41a) including a polarizer (41a 1 ) for reducing s-polarized light and configured to cause light, in which s-polarized light has been reduced by the polarizer, to be incident on the substrate at an angle of incidence within a range of 40° to 55°. |
