Tunable laser with high thermal wavelength tuning efficiency

摘要

A monolithically integrated thermal tunable laser comprising a layered substrate comprising an upper surface and a lower surface, and a thermal tuning assembly comprising a heating element positioned on the upper surface, a waveguide layer positioned between the upper surface and the lower surface, and a thermal insulation layer positioned between the waveguide layer and the lower surface, wherein the thermal insulation layer is at least partially etched out of an Indium Phosphide (InP) sacrificial layer, and wherein the thermal insulation layer is positioned between Indium Gallium Arsenide (InGaAs) etch stop layers.

主权项

1. A monolithically integrated thermal tunable laser, comprising:
a layered substrate, comprising:
a plurality of Indium Gallium Arsenide (InGaAs) etch stop layers; andan Indium Aluminum Arsenide (InAlAs) sacrificial layer positioned between the plurality of InGaAs etch stop layers; a heating element attached to the layered substrate; and a thermal isolation layer etched into the layered substrate and bounded by the InGaAs etch stop layers;
wherein a portion of the InAlAs sacrificial layer is etched out to create the thermal isolation layer.