Piezoelectric device and method for producing piezoelectric device

摘要

A piezoelectric device that prevents defects due to pyroelectric charge without limiting how the piezoelectric device can be used includes a first metal layer located on a bonding surface of a piezoelectric single crystal substrate. A second metal layer is located on a bonding surface of a support substrate. The first and second metal layers are overlaid on each other to define a metal bonded layer. Subsequently, by oxidizing the metal bonded layer, a semi-conducting layer is formed.

主权项

1. A piezoelectric device comprising:
a support substrate; a first oxide layer stacked on the support substrate; a semi-conducting layer composed of a semiconductor material or a mixture of a metal and an oxide of the metal and disposed on the first oxide layer; a second oxide layer stacked on the semi-conducting layer; a piezoelectric thin film stacked on the second oxide layer; and a functional electrode disposed on the piezoelectric thin film.